000			00487nam a2200169Ia 4500
008			230911s9999||||xx |||||||||||||| ||und||
020			_a9780198084808
082			_a621.38152 CAM/THE
100			_aCampbell, Stephen A
245		4	_aThe science and engineering of microelectronic fabrication
250			_a2nd
260			_aNew York _bOxford University Press _c2013
300			_a603
650			_aELECTRICAL AND ELECTRONICS ENGINEERING
700			_aCampbell, Stephen A
942			_cBK
999			_c3979 _d3979