000			01774nam a2200193Ia 4500
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020			_a9780824758240
040			_cNational Institute of Technology Goa
082			_a621 _bALL/MIC
100			_aAllen, James J
245		0	_aMicro electro mechanical system design
250			_a1st
260			_aLondon: _b CRC Taylor & Francis, _c 2015
300			_a465p.: 10x15x1; Paperback
520			_aAbout the book: It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed. The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development: *Understanding the fabrication technologies that are available. *Recognizing the relevant physics involved for micron scale devices. *Considering implementation issues applicable to computer aided design. *Focusing on the engineering details and the subsequent evaluation testing. *Maintaining an eye for detail regarding both reliability and packaging.
650			_aMechanical Engineering; Fabrication processes; MEMS technologies; Electromechanics; MEMS Sensors and actuators; SUMMiT™ technology layout
942			_cBK _2ddc _n0
999			_c3253 _d3253