000			01348nam a2200193Ia 4500
005			20250114100045.0
008			230911s9999||||xx |||||||||||||| ||und||
020			_a9780070487093
040			_cNational Institute of Technology Goa
082			_a621.381 _bHSU/MEM
100			_aHsu, Tai-Ran
245		0	_aMEMS & Microsystems: design and manufacture
250			_a1st
260			_aNew Delhi: _b McGraw Hill Education (India) Private Limited, _c 2016
300			_a436p.: 10x16x1; Paperback
520			_aAbout the book: Hsu's textbook is the first to provide a comprehensive overview of MEMS and micro systems for engineering students. The author provides the background information needed to understand micro technologies, including solid mechanics, physics, and materials. Design and manufacturing aspects of MEMS are covered extensively; and the author chooses examples and applications from a variety of areas, including telecommunications, biomedical device design, manufacturing systems, mechanical systems and aerospace applications. Packaging aspects are also discussed, in the context of MEMS design and manufacture. Key features Comprehensive view of MEMS and Micro Systems and their current applications. Appropriate for any engineering major needing to learn about MEMS.
650			_aMechanical Engineering
942			_cBK _2ddc _n0
999			_c3247 _d3247