| 000 | 00441nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230911s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a9783540858485 | ||
| 082 | _a621.3815422 FRA/LOW | ||
| 100 | _aFranz, Gerhard | ||
| 245 | 0 | _aLow pressure plasmas and microstructuring technology | |
| 260 |
_aNew York _bSpringer _c2009 |
||
| 300 | _a732 | ||
| 650 | _aELECTRONICS AND COMMUNICATION ENGINEERING | ||
| 700 | _aFranz, Gerhard | ||
| 942 | _cBK | ||
| 999 |
_c3187 _d3187 |
||