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MEMS & Microsystems: design and manufacture

By: Material type: TextTextPublication details: New Delhi: McGraw Hill Education (India) Private Limited, 2016Edition: 1stDescription: 436p.: 10x16x1; PaperbackISBN:
  • 9780070487093
Subject(s): DDC classification:
  • 621.381  HSU/MEM
Summary: About the book: Hsu's textbook is the first to provide a comprehensive overview of MEMS and micro systems for engineering students. The author provides the background information needed to understand micro technologies, including solid mechanics, physics, and materials. Design and manufacturing aspects of MEMS are covered extensively; and the author chooses examples and applications from a variety of areas, including telecommunications, biomedical device design, manufacturing systems, mechanical systems and aerospace applications. Packaging aspects are also discussed, in the context of MEMS design and manufacture. Key features Comprehensive view of MEMS and Micro Systems and their current applications. Appropriate for any engineering major needing to learn about MEMS.
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About the book: Hsu's textbook is the first to provide a comprehensive overview of MEMS and micro systems for engineering students. The author provides the background information needed to understand micro technologies, including solid mechanics, physics, and materials. Design and manufacturing aspects of MEMS are covered extensively; and the author chooses examples and applications from a variety of areas, including telecommunications, biomedical device design, manufacturing systems, mechanical systems and aerospace applications. Packaging aspects are also discussed, in the context of MEMS design and manufacture. Key features Comprehensive view of MEMS and Micro Systems and their current applications. Appropriate for any engineering major needing to learn about MEMS.

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