Madou, Marc J <br/><br/>
Fundamentals of microfabrication and nanotechnology: from MEMS to Bio-MEMS and Bio-NEWS manufacturing techniques and applications: Vol. III 

 - 3 
 - London  CRC Press  2012 
 - 642 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MECHANICAL ENGINEERING
<br/><br/><label>Dewey Class. No.: </label>621.38152 MAD/FUN