TY  - BOOK
AU  - Liu, Chang
TI  - Foundations of MEMS
SN  - 9788131764756
U1  - 621.3  
PY  - 2017///
CY  - Noida: 
PB  -  Pearson
KW  - Mechanical Engineering
N2  - About the book: Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking
ER  -