TY  - BOOK
AU  - Franz, Gerhard
AU  - Franz, Gerhard
TI  - Low pressure plasmas and microstructuring technology
SN  - 9783540858485
U1  - 621.3815422 FRA/LOW 
PY  - 2009///
CY  - New York
PB  - Springer
KW  - ELECTRONICS AND COMMUNICATION ENGINEERING
ER  -