Franz, Gerhard <br/><br/>
Low pressure plasmas and microstructuring technology 

 - New York  Springer  2009 
 - 732 
<br/><br/><label>ISBN: </label>9783540858485 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRONICS AND COMMUNICATION ENGINEERING
<br/><br/><label>Dewey Class. No.: </label>621.3815422 FRA/LOW