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Foundations of MEMS

By: Material type: TextTextPublication details: Noida: Pearson, 2017Edition: 2ndDescription: 576p.: 10x14x1; PaperbackISBN:
  • 9788131764756
Subject(s): DDC classification:
  • 621.3  LIU/FOU
Summary: About the book: Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
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Holdings
Item type Current library Call number Status Notes Barcode
Reference Reference Central Library NIT Goa General stacks 621.3 LIU/FOU (Browse shelf(Opens below)) Not for loan Reference Book Rack number 40(A) 9089
Books Books Central Library NIT Goa General stacks 621.3 LIU/FOU (Browse shelf(Opens below)) Available Book Rack number 30(B) 9090

About the book: Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.

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